GE’s Trench Etched Resonant Pressure (Terps) technology is now available for the first time in a range of new pressure sensors from the Sensing business of GE Energy, Measurement & Control Solutions.

“The RPS 8000 and the DPS 8000 resonant silicon pressure sensors offer accuracy and stability greater by a factor of 10 over existing piezoresistive pressure sensors and significantly extend the pressure range capability conventionally associated with resonating pressure technology (RPT) sensors,” a GE spokesman said. The new sensors feature physical isolation from the pressure medium through a metallic isolation diaphragm and an oil-filled chamber and this enables a very robust packaging, suitable for harsh environments. A wide selection of electrical and pressure connectors is available to suit specific requirements. Typical applications range from aerospace to sub-sea and from process engineering and metrology to industrial instrumentation.

As Ian Abbott, product manager for pressure sensors, explains: “Through our Druck product line, we have been able to offer a resonant silicon product, the RPT Series, for some years. The new Terps technology is the result of extensive research and development into the design and manufacture of silicon resonating pressure sensors both within GE and in collaboration with universities. The RPS 8000 and DPS 8000 sensors incorporate this technology and feature all the inherent features of resonant silicon, but with significantly greater capability in terms of pressure range (up to 70 bar), temperature range (-40 deg C to +85 deg C) and mechanical packaging.

“In addition, the bulk micromachining of the silicon, a technology we have migrated from our Advanced Sensors business, greatly improves product delivery dates.”